Ozone free infrared lamp

Thu, 04 Jun 2026 00:52:31 +0800

On the fab floor, you know the drill: a 0.5°C drift in bake temperature can move critical dimensions by nanometers, and the next thing you know, you’re scrapping a whole lot. Traditional lamps also dump ozone into the mix, which chews up optics and coats chambers. Particle counts climb, and you’re back in the bay for unplanned maintenance. We built an ozone-free infrared lamp to take that variable off the table. What matters under the hood We run short-wave infrared emitters tuned for rapid, direct absorption in photoresist and substrate, with the spectrum shaped to keep ozone generation at bay. During soft bake and hard bake, thermal uniformity across the wafer holds at ±0.1°C, which keeps viscosity, thickness, and line-edge roughness stable. Setpoint tracking is under 50 ms, so closed-loop control stays tight and the thermal budget stays consistent. The design is cleanroom-ready for Class 1–100. The lamp assembly sheds zero particles, and the sealed quartz envelope keeps outgassing low. Output stays steady over 5,000+ hours, with less than a 5% drop in intensity—so you can run 24/7 without recalibration. Why this lands in lithography Photoresist processing lives and dies on repeatable temperature profiles. This lamp delivers repeatable bake profiles across the wafer, which pushes yield up and scrap down. Faster thermal settling shortens cycle time, and you don’t pay for it in uniformity. Energy use drops because the heat goes straight to the target, not into heating the chamber. Zero ozone means fewer contamination events, longer optics life, and predictable preventive maintenance windows. What you need to plan for The lamp needs a dedicated, clean power feed, and mounting tolerances have to be tight to keep focal distance and uniformity where they should be. It integrates easily with existing bake/chill plates and track systems, but verify thermal interface alignment during install. There’s also a brief warm-up to reach spectral stability—factor that into process qualification so it doesn’t bite you on the first run.

Ozone on Indoor Warm IR Solutions

Ozone free infrared lamp