http://warm-ir-indoor.com/zh/tags/%E7%B3%BB%E7%BB%9F/ Recent content in 系统 on Indoor Warm IR Solutions Hugo zh Wed, 10 Jun 2026 01:49:41 +0800 http://warm-ir-indoor.com/zh/posts/industrial-wafer-drying-system-heater/ Wed, 10 Jun 2026 01:49:41 +0800 http://warm-ir-indoor.com/zh/posts/industrial-wafer-drying-system-heater/ <p><img src="http://warm-ir-indoor.com/images/e359da41a435291bc4b653b358552252.png" alt="工业晶圆干燥系统加热器"></p> <p>在晶圆厂车间，晶圆刚从最后一次清洗中取出——这时计时开始。如果在湿区停留时间过长，会导致图案坍塌。即使烘烤步骤温度波动一度，也会产生光刻胶缺陷，这些缺陷直到电气测试时才会显现。</p>